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Investigation of N2 Plasma Effects on the Density Profile of Hydrogen Silsesquioxane Thin Films

Published online by Cambridge University Press:  17 March 2011

H. J. Lee ,
E. K. Lin ,
W. L. Wu ,
B. M. Fanconi ,
J. K. Lan ,
Y. L. Cheng ,
H. C. Liou ,
Y. L. Wang ,
M. S. Feng  and
C. G. Chao
H. J. Lee
Affiliation:
National Institute of Standards and Technology, Polymers Division, Gaithersburg, MD, USA
E. K. Lin
Affiliation:
National Institute of Standards and Technology, Polymers Division, Gaithersburg, MD, USA
W. L. Wu
Affiliation:
National Institute of Standards and Technology, Polymers Division, Gaithersburg, MD, USA
B. M. Fanconi
Affiliation:
National Institute of Standards and Technology, Polymers Division, Gaithersburg, MD, USA
J. K. Lan
Affiliation:
Taiwan Semiconductor Manufacturing Co., Hsin-Chu, Taiwan National Chiao-Tung University, Hsin-Chu, Taiwan
Y. L. Cheng
Affiliation:
Taiwan Semiconductor Manufacturing Co., Hsin-Chu, Taiwan National Chiao-Tung University, Hsin-Chu, Taiwan
H. C. Liou
Affiliation:
Semiconductor Fabrication Materials KCI, Dow Corning, USA
Y. L. Wang
Affiliation:
Taiwan Semiconductor Manufacturing Co., Hsin-Chu, Taiwan
M. S. Feng
Affiliation:
National Chiao-Tung University, Hsin-Chu, Taiwan
C. G. Chao
Affiliation:
National Chiao-Tung University, Hsin-Chu, Taiwan
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Abstract

The density depth profile and chemical bond structure of hydrogen silsesquioxane (HSQ) thin films treated with an N2 plasma with varying power and exposure time were measured using specular x-ray reflectivity (SXR) and Fourier transform infrared (FTIR) spectroscopy. The SXR data indicate that the density profile of an untreated HSQ film is not uniform and four layers with different electron densities were required to fit the SXR data. For HSQ films treated with either increasing plasma power or plasma exposure time, the film roughness increased and a densified layer was observed at the film/air interface. The thickness of the densified layer increased with both plasma power and plasma exposure time. As a result, up to seven distinct layers were used to model the experimental SXR data from plasma treated films. The FTIR data show that the plasma transforms the Si-H bonds in the HSQ film into Si-O bonds leaving more oxygen atoms around a Si atom. These data are also consistent with the densification observed in the SXR measurements. In general, the HSQ film is more sensitive to increasing plasma power than to increasing plasma exposure time.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 714: Symposium – Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II , 2001 , L7.10.1
Copyright
Copyright © Materials Research Society 2001

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References

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