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Measurement of Stress In CVD Diamond Films

Published online by Cambridge University Press:  15 February 2011

K. J. Gray ,
J. M. Olson  and
H. Windischmann
K. J. Gray
Affiliation:
Norton Diamond Films, Goddard Road, Northboro, MA 01532
J. M. Olson
Affiliation:
Norton Diamond Films, Goddard Road, Northboro, MA 01532
H. Windischmann
Affiliation:
Norton Diamond Films, Goddard Road, Northboro, MA 01532
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Abstract

Measurement of stress in CVD diamond by Raman spectroscopy and by the substrate curvature method is discussed. A correction to the commonly applied Stoney thin-film equation for the substrate curvature technique is presented for coatings with a large stiffness mismatch with the substrate. Stress measurement by Raman spectroscopy is complicated by factors such as temperature, domain size, non-hydrostatic stress, and degeneracy lifting. With proper consideration of these complicating factors, substrate curvature and Raman spectroscopy stress measurement results can be reconciled with the predictions based on thermal modeling.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 383: Symposium I – Mechanical Behavior of Diamond and Other Forms of Carbon , 1995 , 135
Copyright
Copyright © Materials Research Society 1995

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References

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