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Modification of the electrical and optical Properties of Single Crystal Diamond with Focused MeV Ion Beams

Published online by Cambridge University Press:  31 January 2011

Ettore Vittone ,
Oksana Budnyk ,
Alessandro Lo Giudice ,
Paolo Olivero ,
Federico Picollo ,
Hao Wang ,
Federico Bosia ,
Silvia Calusi ,
Lorenzo Giuntini  and
Mirko Massi
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Ettore Vittone
Affiliation:
ettore.vittone@unito.it, University of Torino, Experimental Physics, Torino, Italy
Oksana Budnyk
Affiliation:
oksana.budnyk@unito.it, University of Torino, Experimental Physics, Torino, Italy
Alessandro Lo Giudice
Affiliation:
logiudice@to.infn.it, University of Torino, Experimental Physics, Torino, Italy
Paolo Olivero
Affiliation:
olivero@to.infn.it, University of Torino, Experimental Physics, Torino, Italy
Federico Picollo
Affiliation:
picollo.federico@tiscali.it, University of Torino, Experimental Physics, Torino, Italy
Hao Wang
Affiliation:
hao.wang@to.infn.it, University of Torino, Experimental Physics, Torino, Italy
Federico Bosia
Affiliation:
federico.bosia@to.infn.it, University of Torino, Theoretical Physics, torino, Italy
Silvia Calusi
Affiliation:
calusi@fi.infn.it, University of Florence, Department of Physics, Firenze, Italy
Lorenzo Giuntini
Affiliation:
giuntini@fi.infn.it, University of Florence, Department of Physics, Firenze, Italy
Mirko Massi
Affiliation:
massi@fi.infn.it, University of Florence, Department of Physics, Firenze, Italy
Stefano Lagomarsino
Affiliation:
lagomarsino@fi.infn.it, University of Florence, Department of Energetics, Firenze, Italy
Silvio Sciortino
Affiliation:
sciortino@fi.infn.it, University of Florence, Department of Energetics, Firenze, Italy
Giampiero Amato
Affiliation:
gamato@inrim.it, INRIM, Torino, Italy
fabio Bellotti
Affiliation:
f.bellotti@inrim.it, INRIM, Torino, Italy
Stefano Borini
Affiliation:
s.borini@inrim.it, INRIM, Torino, Italy
Milko Jaksic
Affiliation:
jaksic@irb.hr, Ruđer Bošković Institute, Laboratory for Ion Beam Interactions,, Zagreb, Croatia
Zeljko Pastuovic
Affiliation:
pastu@irb.hr, Ruđer Bošković Institute, Laboratory for Ion Beam Interactions,, Zagreb, Croatia
Natko Skukan
Affiliation:
nskukan@irb.hr, Ruđer Bošković Institute, Laboratory for Ion Beam Interactions,, Zagreb, Croatia
Maurizio Vannoni
Affiliation:
maurizio.vannoni@inoa.it, CNR, Istituto Nazionale di Ottica Applicata (INOA), Firenze, Italy
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Abstract

In this paper an overview is given on recent results obtained in the framework of an Italian/Croatian collaboration aimed to explore the potential of techniques based on focused MeV ion beams to locally modify the structural, electrical and optical features of diamond.

Experiments were carried out using light (H, He, C) ion beams with energies of the order of MeV, focused to micrometer-size spot and raster scanned onto the surface of monocrystalline (IIa or Ib) diamond samples. Different energies, ion species and fluences were used, in conjunction with variable thickness masks and post annealing processes, to define three-dimensional structures in diamond, whose electrical/optical/structural properties have been suitably characterized. Finite element numerical methods have been employed in the modeling of the material modification and in device design.

Keywords

diamondion-implantationstructural
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1203: Symposium J – Diamond Electronics and Bioelectronics-Fundamentals to Applications III , 2009 , 1203-J17-06
Copyright
Copyright © Materials Research Society 2010

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