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Fabrication and analytical modeling of transverse mode piezoelectric energy harvesters

Published online by Cambridge University Press:  25 May 2012

Seon-Bae Kim
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL 36849, U.S.A.
Jung-Hyun Park
Affiliation:
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439, U.S.A.
Seung-Hyun Kim
Affiliation:
School of Engineering, Brown University, Providence, RI 02919, U.S.A.
Hosang Ahn
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL 36849, U.S.A.
H. Clyde Wikle
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL 36849, U.S.A.
Dong-Joo Kim
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL 36849, U.S.A.
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Abstract

A transverse (d33) mode piezoelectric cantilever was fabricated for energy harvesting. Various dimensions of interdigital electrodes (IDE) were deposited on a piezoelectric layer to examine the effects of electrode design on the performance of energy harvesters. Modeling was performed to calculate the output power of the devices. The estimation was based on Roundy’s analytical modeling derived for a d31 mode piezoelectric energy harvester (PEH). In order to apply the Roundy’s model to d33 mode PEH, the IDE configuration was converted to the area of top and bottom electrodes (TBE). The power conversion in d33 mode PEH was commonly estimated by the product of piezoelectric layer’s thickness and finger electrode’s length. In addition, the spacing between fingers was regarded as gap between top and bottom electrodes. However, the output power in a transverse mode PEH increases continuously with the increase of finger spacing, which does not correspond to experimental results. In this research, the dimension of IDE was converted to that of TBE using conformal mapping, and variation of power of PEH was remodeled. The modified model suggests that the maximum power in a transverse mode PEH is obtained when the finger spacing is identical with effective finger spacing. The output power then decreases when finger spacing is larger than effective finger spacing. The decrease of efficiency may result from insufficient degree of poling and increased charged defect with increasing finger spacing.

Type
Research Article
Copyright
Copyright © Materials Research Society 2012

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References

REFERENCES

1. Beeby, S. P., Tudor, M. J. and White, N. M., Meas. Sci. Technol. 17, R175R195 (2006).Google Scholar
2. Cook-Chennault, K. A., Thambi, N. and Sastry, A. M., Smart Mater. Struct. 17(4), 043001 (2008).Google Scholar
3. Roundy, S., Intell, J.. Mater. Syst. Struct. 16(10), 809824 (2005).Google Scholar
4. Park, J.-H., Ahn, H., Kim, S.-B., Kim, S.-H. and Kim, D.-J., in MEMS and Nanotechnology, Volume 2, edited by Proulx, T. (Springer New York, 2011), Vol. 2, pp. 3339.Google Scholar
5. Shen, D., Choe, S.-Y. and Kim, D.-J., Jpn. J. Appl. Phys. 46 (Copyright (C) 2007 The Japan Society of Applied Physics), 67556760 (2007).Google Scholar
6. Igreja, R. and Dias, C. J., Sens. Actuators, A 112(2-3), 291301 (2004).Google Scholar
7. Yi, J. W., Shih, W. Y. and Shih, W.-H., J. Appl. Phys. 91(3), 16801686 (2002).Google Scholar
8. Blom, F. R., Bouwstra, S., Elwenspoek, M. and Fluitman, J. H. J., J. Vac. Sci. Technol., B 10(1), 1926 (1992).Google Scholar
9. Duval, F. F. C., Dorey, R. A., Wright, R. W., Huang, Z. and Whatmore, R. W., J. Electroceram. 13(1), 267270 (2004).Google Scholar
10. Xu, B., Cross, L. E. and Bernstein, J. J., Thin Solid Films 377-378, 712718 (2000).Google Scholar
11. Xu, B., Ye, Y., Cross, L. E., Bernstein, J. J. and Miller, R., Appl. Phys. Lett. 74(23), 35493551 (1999).Google Scholar
12. Zhang, Q. Q., Gross, S. J., Tadigadapa, S., Jackson, T. N., Djuth, F. T. and Trolier-McKinstry, S., Sens. Actuators, A 105(1), 9197 (2003).Google Scholar
13. Park, J. C., Park, J. Y. and Lee, Y.-P., J. Microelectromech. Syst. 19(5), 12151222 (2010).Google Scholar
14. Buhlmann, S., Colla, E. and Muralt, P., Phys. Rev. B 72(21), 214120 (2005).Google Scholar