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A study for molecular steps observation of pentacene film by use of ultra-low voltage SEM

Published online by Cambridge University Press:  05 August 2007

S Takeuchi ,
A Muto ,
M Nakagawa ,
T Sawahata ,
Y Aoki ,
N Sakamoto ,
T Miyadera ,
T Minari  and
K Tsukagoshi
S Takeuchi
Affiliation:
Hitachi High-Technologies Corporation,Japan
A Muto
Affiliation:
Hitachi High-Technologies Corporation,Japan
M Nakagawa
Affiliation:
Hitachi High-Technologies Corporation,Japan
T Sawahata
Affiliation:
Hitachi High-Technologies Corporation,Japan
Y Aoki
Affiliation:
Hitachi High-Technologies Corporation,Japan
N Sakamoto
Affiliation:
Hitachi High-Tech Science Systems Corporation,Japan
T Miyadera
Affiliation:
RIKEN,Japan
T Minari
Affiliation:
RIKEN,Japan
K Tsukagoshi
Affiliation:
RIKEN,Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 582 - 583
Copyright
© 2007 Microscopy Society of America

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