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Metal Electrodes Work Function Measurement at Deca-Nanometer Scale using Kelvin Probe Force Microscope: a Step Forward to the Comprehension of Deposition Techniques Impact on Devices Electrical Properties

Published online by Cambridge University Press:  01 February 2011

Nicolas Gaillard ,
Denis Mariolle ,
Francois Bertin ,
Mickael Gros-Jean  and
Ahmad Bsiesy
Nicolas Gaillard
Affiliation:
nicolas.gaillard@st.com, STMicroelectronics, BEOL Materials, 850, rue Jean Monnet, Crolles, N/A, 38926, France, +33476926381
Denis Mariolle
Affiliation:
denis.mariolle@cea.fr, CEA/GRE, CEA-DRT-LETI, 17 rue des martyrs, Grenoble, N/A, 38054, France
Francois Bertin
Affiliation:
francois.bertin@cea.fr, CEA/GRE, CEA-DRT-LETI, 17 rue des martyrs, Grenoble, N/A, 38054, France
Mickael Gros-Jean
Affiliation:
mickael.gros-jean@st.com, STMicroelectronics, 850, rue Jean Monnet, Crolles, N/A, 38926, France
Ahmad Bsiesy
Affiliation:
bsiesy@drfmc.ceng.cea.fr, Spintec Laboratory, CEA-DRFMC, 17 rue des martyrs, Grenoble, N/A, 38054, France
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Abstract

In this letter, we report on Work Function (WF) measurements performed at deca-nanometer scale on various metals using Kelvin probe Force Microscope (KFM). We first demonstrated the relationship between the WF value and the grain crystallographic orientation by combining KFM and Electron Back Scattered Diffraction (EBSD) performed over the same Cu area. Once this relationship was established, KFM was used to provide, in addition to WF value, crystallographic properties of TiN PVD films grown on various substrates. Finally we characterized the effect of N2/H2 plasma treatment on the WF of TiN grown by CVD. In the latter case, the modification of the bulk chemical potential by post-treatment was proposed.

Keywords

metalelectrical propertiescrystallographic structure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 917: Symposium E – Gate Stack Scaling – Materials Selection, Role of Interfaces, and Reliability Implications , 2006 , 0917-E12-04
Copyright
Copyright © Materials Research Society 2006

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