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Localized Fabrication of Mental Contacts and Electrical Measurements on Multi walled Carbon Nanotubes

Published online by Cambridge University Press:  15 February 2011

J. Ziroff
Affiliation:
School of NanoSciences and NanoEngineering and Albany Institute for Materials University at Albany-SUNY251 Fuller Rd., New York 12203, U.S.A
G. Agnello
Affiliation:
School of NanoSciences and NanoEngineering and Albany Institute for Materials University at Albany-SUNY251 Fuller Rd., New York 12203, U.S.A
J. Rullan
Affiliation:
School of NanoSciences and NanoEngineering and Albany Institute for Materials University at Albany-SUNY251 Fuller Rd., New York 12203, U.S.A
K. Dovidenko
Affiliation:
School of NanoSciences and NanoEngineering and Albany Institute for Materials University at Albany-SUNY251 Fuller Rd., New York 12203, U.S.A
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Abstract

A Focused Ion Beam (FIB) microscope was to locally deposit platinum contacts on Multiwalled Carbon Nanotubes (MWNTs) for resistance and current carrying capability measurements. We have determined the resistivity of these ultra-thin Pt lines and the MWNT-Pt contact resistance to account for contributions to the MWNT measurements. We have studied the effects of secondary mental deposition around the contacts (‘halo’ effect) on the MENT electrical measurements as well as effects of ion beam exposure and possible ways to avoid/minimize them. Transmission Electron Microscopy data was used to evalutate MWNT surface modifications due to ion beam exposure and Pt deposition.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

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References

1. Dresselhaus, M.S., Dresselhaus, G., Avouris, Ph., Carbon Nanotubes, (Springer Verlag, Berlin, Heidelberg, 2001), P. 349 Google Scholar
2. Lee, J.-O., Park, C., Kim, J.-J., Kim, J.., Yoo, K.-H., J.Phys.D: Appl.Phys. 33 19351956 (2000)Google Scholar
3. Wei, B., Spolenak, R., Kohler-Redlich, Ph., Rühle, M., Arzt, E., Appl.Phys.Lett. 74, 21 31493151 (1999)Google Scholar
4. Wei, B., Vajtai, R., Ajayan, P.M., Appl.Phys.Lett. 79, 8 11721174 (2001)Google Scholar
5. Ebbesen, T.W., Lezec, H.J., Hiura, H., Bennett, J.W., Ghaemi, H.F., Thio, T. Nature (London) 382, 54 (1996)Google Scholar
6. Focused Ion Beam Workstations User Guide (Technical Publications Dept. FEI Company, Hillsboro) p. 56.Google Scholar
7. Dovidenko, K., Rullan, J., Moore, R., Dunn, K.A., Geer, R.E., Heychling, F., Three-Dimensional Nanoengineered Assemblies, edited by Orlando, T.M., Merhari, L., Ikuta, K., Taylor, D.P., Mater. Res. Soc. Proc. 739 (2003)Google Scholar
8. Collins, P.G.,Avouris, Ph., Appl. Physics A 74 329332 (2002)Google Scholar
9. Harris, Peter J.F., in Carbon Natotubes and Related Structures: New Materials for the Twenty-first century (University Press, Cambridge 1999) p.127 Google Scholar
10. Collins, Ph.G., Hersam, M., Arnold, M., Martel, R., Avouris, Ph., Phys. Rev. Lett. 86, 14 31283131 (2001)Google Scholar
11. Biersack, J.P., Nucl.Instr.and Meth, B 27, 21 (1987)Google Scholar