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Microstructural Characterization of Texture in Tungsten Films made by Ion-Assisted Evaporation

Published online by Cambridge University Press:  25 February 2011

K. Rajan ,
R. A. Roy ,
R. Petkie  and
K. V. Ramanathan
K. Rajan
Affiliation:
Materials Engineering Department, Rensselaer Polytechnic Institute, Troy, N.Y. 12180
R. A. Roy
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY 10598
R. Petkie
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY 10598
K. V. Ramanathan
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY 10598
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Abstract

The microstructure of tungsten films deposited by ion-assisted evaporation (IAE) has been examined by transmission electron microscopy. It is proposed that grain shape is strongly associated with stress and texture changes in IAE films. Evidence is also found of stress induced damage in the substrate due to stress transfer from the deposited tungsten films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 43
Copyright
Copyright © Materials Research Society 1990

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References

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