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Thermal and Pressure Sensing by Chemoreceptive Neuron MOS Transistors (CνMOS) with PVDF Coating

Published online by Cambridge University Press:  01 February 2011

Blake Jacquot ,
Nini Muñoz  and
Edwin C. Kan
Blake Jacquot
Affiliation:
bcj7@cornell.edu, Cornell University, Electrical and Computer Engineering, 323 Phillips Hall, School of Electrical and Computer Engineering, Ithaca, NY, 14853, United States
Nini Muñoz
Affiliation:
nlm9@cornell.edu, Cornell University, School of Electrical and Computer Engineering, Ithaca, NY, 14853, United States
Edwin C. Kan
Affiliation:
kan@ece.cornell.edu, Cornell University, School of Electrical and Computer Engineering, Ithaca, NY, 14853, United States
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Abstract

This paper reports the integration of poled 10μm +/- 1μm P(VDF-TrFe) copolymer thin films with an adapted non-volatile, foundry-compatible CMOS structure (CνMOS) for the potential purposes of in-vivo piezoelectric and pyroelectric sensing. This structure allows for direct, reliable interaction between the sensing transducer and the highly sensitive MOSET gate stack without the need for an external reference electrode or chopper, as other designs may require.

Keywords

sensorSipiezoelectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 952: Symposium F – Integrated Nanosensors , 2006 , 0952-F09-08
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

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