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Uniformity of Misfit Strain in Heteroepitaxial (Ba, Sr)Tio3 Films on SrRuO3/SrTiO3

Published online by Cambridge University Press:  10 February 2011

K. Abe ,
N. Yanase ,
K. Sano ,
N. Fukushima  and
T. Kawakubo
K. Abe
Affiliation:
Materials and Devices Research Laboratories, R&D Center, Toshiba Corp., Komukai-Toshibacho, Saiwai-ku, Kawasaki 210–8582, Japan. kazuhide.abe@toshiba.co.jp
N. Yanase
Affiliation:
Materials and Devices Research Laboratories, R&D Center, Toshiba Corp., Komukai-Toshibacho, Saiwai-ku, Kawasaki 210–8582, Japan. kazuhide.abe@toshiba.co.jp
K. Sano
Affiliation:
Materials and Devices Research Laboratories, R&D Center, Toshiba Corp., Komukai-Toshibacho, Saiwai-ku, Kawasaki 210–8582, Japan. kazuhide.abe@toshiba.co.jp
N. Fukushima
Affiliation:
Materials and Devices Research Laboratories, R&D Center, Toshiba Corp., Komukai-Toshibacho, Saiwai-ku, Kawasaki 210–8582, Japan. kazuhide.abe@toshiba.co.jp
T. Kawakubo
Affiliation:
Materials and Devices Research Laboratories, R&D Center, Toshiba Corp., Komukai-Toshibacho, Saiwai-ku, Kawasaki 210–8582, Japan. kazuhide.abe@toshiba.co.jp
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Abstract

Uniformity of lattice misfit strain was quantitatively evaluated in heteroepitaxial (Ba, Sr)TiO3 films which were deposited by radio-frequency magnetron sputtering on SrRuO3/SrTiO3 substrates. Due to lattice misfit strain, the (Ba, Sr)TiO3 films had a 3% longer c-axis than the inherent bulk of (Ba0.75Sr0.25)TiO3. As analyzed by Hall's theory, the uniformity of the strain was 0.3% of the c-axis (0.413 nm) and 9% of the elongation of the c-axis (0.015 nm). It was suggested by the comparative study of two specimens that there is a strong correlation between the quality of the ferroelectric hysteresis loop and the uniformity of the misfit strain in heteroepitaxial (Ba,Sr)TiO3 films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 574: Symposia BB – Multicomponent Oxide Films for Electronics , 1999 , 3
Copyright
Copyright © Materials Research Society 1999

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References

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