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Stress Transients Generated by Excimer-Laser Irradiation of Polyimide

Published online by Cambridge University Press:  01 January 1992

A. D. Zweig ,
V. Venugopalan  and
T. F. Deutsch
A. D. Zweig
Affiliation:
Wellman Laboratories of Photomedicine, Massachusetts General Hospital, Department of Dermatology, Harvard Medical School, Boston, MA 02114
V. Venugopalan
Affiliation:
Wellman Laboratories of Photomedicine, Massachusetts General Hospital, Department of Dermatology, Harvard Medical School, Boston, MA 02114 Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
T. F. Deutsch
Affiliation:
Wellman Laboratories of Photomedicine, Massachusetts General Hospital, Department of Dermatology, Harvard Medical School, Boston, MA 02114
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Abstract

We measure the stress transients resulting from pulsed excimer laser irradiation of polyimide at 351, 308, 248 and 193 nm, using thin (9 μm) piezoelectric PVDF (polyvinylidene fluoride) films. We find that fluences between 3·10−3 and 102 J/cm2 generate peak stresses between 104 and 109 Pa. Further, the results show three ranges of fluence where different physical mechanisms mediate the stress generation. In the lowest range of fluence, subsurface thermal decomposition (for λ = 351 and 308 nm) and photodecomposition (for λ = 248 and 193 nm) govern the generation of the observed stresses. At higher fluences we identify two regimes, independent of laser wavelength, where the gas dynamic expansion of the ablation products and plasma formation and expansion, are responsible for the generated stresses.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 69
Copyright
Copyright © Materials Research Society 1993

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References

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