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A New 3D Multistring Code to Identify Compound Oxide Nanophase With Ion Channeling

Published online by Cambridge University Press:  01 February 2011

James Douglas Bradley ,
Nicole Herbots ,
Robert Culbertson ,
Justin Shaw  and
Vasu Atluri
James Douglas Bradley
Affiliation:
james.bradley@medtronic.com, Arizona St. University, Department of Physics, PO Box 871504, Tempe, AZ, 85287-1504, United States
Nicole Herbots
Affiliation:
herbots@asu.edu, Arizona St. University, Physics and Astronomy, ASU Dept. of Physics and Astronomy, Box 1530, Tempe, AZ, 85287, United States
Robert Culbertson
Affiliation:
robert.culbertson@asu.edu, Arizona St. University, Department of Physics, PO Box 871504, Tempe, AZ, 85287-1504, United States
Justin Shaw
Affiliation:
justin.shaw@nist.gov, NIST Magnetics Group, Magnetics Group, 325 Broadway, Mailstop 818.03, Boulder, CO, 80305, United States
Vasu Atluri
Affiliation:
vasu.atluri@asu.edu, Arizona St. University, Department of Physics, PO Box 871504, Tempe, AZ, 85287-1504, United States
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Abstract

A new 3DMultiString computer code of Ion Beam Analysis (IBA) using 4He++ ion channeling combined with Nuclear Resonance Analysis (NRA) is used to analyze controlled formation of order in continuous layers of silicon dioxide nucleated on (1×1) Si(100) via the Herbots-Atluri clean (U.S. patent 6,613,677 (9/3/2003)) in air at 300 K. In our most recent work, this new 3DMultiString simulations combined with IBA leads to the identification of a new two-dimensional nanophase of tetragonally distorted β-cristobalite SiO2 (annotated b-c SiO2) with a critical thickness of 2 nm from the (1×1) Si (100)/b-c SiO2 interface to the b-c SiO2 /amorphous SiO2 interface (annotated b-c SiO2/a-SiO2). 3DMultiString simulations of IBA data taken on this new b-c SiO2/(1×1) Si(100) interphase includes channeling along the three <100>, <110>, and <111> axes of Si (100) in combination 16OO(α, α)16O 3.045 MeV NRA to measure oxygen areal densities corresponding to nm-thick films. In this way, the critical thickness of the β-c SiO2 nanophase can be established as a function of oxygen coverage. This new 3DMultiSTRING computer code is derived from the original 3DSTRING program that originated at Bell Labs, NJ.

Keywords

ion beam analysissimulationoxide
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 996: Symposium H – Characterization of Oxide/Semiconductor Interfaces for CMOS Technologies , 2007 , 0996-H05-14
Copyright
Copyright © Materials Research Society 2007

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