Hostname: page-component-76fb5796d-wq484 Total loading time: 0 Render date: 2024-04-27T02:05:25.648Z Has data issue: false hasContentIssue false

Continuous Tunable Optical Detectors with a-Si:H Bias Sensitive Photodiodes

Published online by Cambridge University Press:  25 May 2011

Christian Merfort
Affiliation:
Institute for Microsystem Technologies (IMT), Siegen University, Hoelderlinstr. 3, 57076, Germany
Konstantin Seibel
Affiliation:
Institute for Microsystem Technologies (IMT), Siegen University, Hoelderlinstr. 3, 57076, Germany
Andreas Bablich
Affiliation:
Institute for Microsystem Technologies (IMT), Siegen University, Hoelderlinstr. 3, 57076, Germany
Krystian Watty
Affiliation:
Institute for Microsystem Technologies (IMT), Siegen University, Hoelderlinstr. 3, 57076, Germany
Markus Boehm
Affiliation:
Institute for Microsystem Technologies (IMT), Siegen University, Hoelderlinstr. 3, 57076, Germany
Get access

Abstract

Today’s image-based systems in civil security rely on sensors based either on CMOS or CCD technology, and they do not analyze color with sufficient equivalence to the human eye. The main reason for this is that the function of the fundamental color matching curves of the cones in the human eye can hardly be reproduced by technical systems [1]. Common color sensors are optimized for the three-area method in accordance with the standard DIN 5033-6. In civil security applications, for example, color sensors are used to identify the potential danger of whitish powder samples. Colorimetric classification based on the three-area method only provides suboptimal results [2], but not an unequivocal optical description. A series of tests performed at the IMT with more than 30 types of whitish powder samples were carried out with a spectrophotometer. These measurements showed that specimens with similar or different chemical compositions cannot be distinguished by the human eye, using the three-area method, exhibit characteristic differences in the CIE-L*a*b* measurement system under spectral method conditions. Until now, the realization of the spectral method on chip has been impossible with common color sensors. In this paper, we present a-Si:H-based bias-sensitive ni3p photodiodes, which have been fabricated successfully in a low temperature PECVD process. Present research focuses on the optimization of the continuous tunability of a-Si:H multispectral photodiodes, to increase the number of spectral stimulus specifications.

Type
Research Article
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Richter, M., “Einführung in die Farbmetrik”, 2. ed., (De Guryter, 1981).Google Scholar
2. Bohnert, M. and Werp, J., Rechtsmedizin, 9, 218221 (1999).Google Scholar
3. Lange, B., “Kolorimetrische Analyse”, 6. ed., (Verlag Chemie, 1964).Google Scholar
4. Rieve, P., Giehl, J., Zhu, Q. and Böhm, M., Proc. Mater. Res. 420, 159164 (1996).Google Scholar
5. Rieve, P., PhD Thesis, (University of Siegen, 2000).Google Scholar
6. Sommer, M., Rieve, P., Verhoeven, M., Böhm, M., Schneider, B., van Uffel, B. and Librecht, F., Proc. IEEE Workshop on CCD and Advanced Image Sensors , Japan (1999).Google Scholar
7. Lulé, T., Wagner, M., Verhoeven, M., Keller, H. and Böhm, M., IEEE Journal of Solid-State Circuits 35, 732739 (2000)Google Scholar
8. Böhm, M., Lulé, T., Fischer, H., Schulte, J., Schneider, B., Benthien, S., Blecher, F., Coors, S., Eckardt, A., Keller, H., Rieve, P., Seibel, K., Sommer, M. and Sterzel, J., Digest of Technical Papers Symposium on VLSI Circuits, 202203, (1998).Google Scholar
9. Merfort, C., Seibel, K., Watty, K. and Böhm, M., Microelectron Eng. (2010)/ DOI 10/1016/j.mee.2009.12.052.Google Scholar
10. Watty, K., Merfort, C., Seibel, K., Schöler, L. and Böhm, M., Phys. Status Solidi A, 14 (2010) /DOI 10.1002/pssa.200982722.Google Scholar
11. Schneider, B., Rieve, P. and Böhm, M., “Handbook of Computer Vision and Applications”, (Academic Press, 1999).Google Scholar