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Preparation of a Supported Si3N4 Membrane for Gas Filters

Published online by Cambridge University Press:  15 February 2011

Fei Cheng
Affiliation:
Department of Chemistry, University of Hull, Cottingham Road, Hull, HU6 7RX, UK Marc Baumbach and Andreas Schütze Saarland University, Lab for Measurement Technology, Saarbrücken, Germany
Stephen M. Kelly
Affiliation:
Department of Chemistry, University of Hull, Cottingham Road, Hull, HU6 7RX, UK Marc Baumbach and Andreas Schütze Saarland University, Lab for Measurement Technology, Saarbrücken, Germany
Stephen Clark
Affiliation:
Department of Chemistry, University of Hull, Cottingham Road, Hull, HU6 7RX, UK Marc Baumbach and Andreas Schütze Saarland University, Lab for Measurement Technology, Saarbrücken, Germany
John S. Bradley
Affiliation:
Department of Chemistry, University of Hull, Cottingham Road, Hull, HU6 7RX, UK Marc Baumbach and Andreas Schütze Saarland University, Lab for Measurement Technology, Saarbrücken, Germany
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Abstract

A supported Si3N4 membrane was prepared via a non-aqueous sol-gel process using tris(dimethylamino)silylamine, H2NSi(NMe2)3, as a starting material. The SEM image indicated the formation of the Si3N4 membrane with thickness about 2.3 μ m on the surface of the α-Al2O3 support. Nitrogen adsorption analysis indicated that, although most of the pores were similar to those of the α-Al2O3 disk, a new pore size distribution of 20–50 Å for the Si3N4 membrane was observed. The new membrane demonstrates high selective absorption of NO2, suggesting a potential application as a selective filter for gas sensors.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

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References

1. Kusakabe, K., Li, Z. Y., Masda, H. and Morooka, S., J. Membrane Sci., 103, 175 (1995).Google Scholar
2. Kurada, K., Kubo, N. and Yazawa, T., J. Sol-Gel Sci. and Technol., 19, 515 (2000).Google Scholar
3. Menini, P., Parret, F., Guerrero, M., Martinez, A., Soulantica, K., Erades, L., Maisonnat, A. and Chaudret, B., Sens. & Actuators B, 103, 111 (2004).Google Scholar
4. Fau, P., Sauvan, M., Trautweiler, S., Nayral, C., Erades, L., Maisonnat, A. and Chaudret, B., Sens. & Actuators B, 78, 83 (2001).Google Scholar
5. Brinker, C. J. and Schere, G. W., Sol-Gel Science, Academic Press, London, 1990.Google Scholar
6. Rovai, R., Lehmann, C. W. and Bradley, J. S., Angew. Chem. Int. Ed., 38, 2036 (1999).Google Scholar
7. Cheng, F., Clark, S., Kelly, S. M., Bradley, J. S. and Lefebvre, F., J. Am. Ceram. Soc., 87, 1413 (2004).Google Scholar
8. Baumbach, M., Schütze, A., Cheng, F., Kelly, S. M., Delprat, H., Parret, F., Menini, P., Soulantica, K., Chaudret, B. and Maisonat, A., Proceedings IEEE Sensors Conference 2004, Vienna, Austria, Oct. 25-27, 2004.Google Scholar