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Scanning Probe Microscopy with Diamond Tip in Tribo-nanolithography

Published online by Cambridge University Press:  18 May 2011

Oleg Lysenko ,
Vladimir Grushko ,
Evgeni Mitskevich  and
Athanasios Mamalis
Oleg Lysenko
Affiliation:
Institute for Superhard Materials, Kiev, Ukraine
Vladimir Grushko
Affiliation:
Project Center for Nanotechnology and Advanced Engineering, NCSR “Demokritos”, Athens, Greece
Evgeni Mitskevich
Affiliation:
Project Center for Nanotechnology and Advanced Engineering, NCSR “Demokritos”, Athens, Greece
Athanasios Mamalis
Affiliation:
Project Center for Nanotechnology and Advanced Engineering, NCSR “Demokritos”, Athens, Greece
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Abstract

The results obtained by direct nano-patterning demonstrate the potential of the SPM-based techniques that include surface scratching to create 3D nanostructures. Such techniques became known as tribo-nanolithography and have prospects of being successfully implemented in the future nanofabrication industry. An important obstacle to this, however, is the effect of wear at the nanometer scale which is critical to the stability of tribo-nanolithoraphic processes. Such stability is achievable via in-depth theoretical and experimental studies of friction at the nanoscale along with the development of pioneering equipment. Our work presents the results of experimental fabrication of nanostructures formed by nanoscratching with the use of the multifunctional scanning tunneling microscopy previously developed by the authors. The authors attempted scratching the silicon surface by using a boron-doped diamond tip. This operation was undertaken in the same direction sequentially with the tip sliding a side of the groove by one of the tip’s facets and the consequent surface scanning. Although not being applicable to non-conductive surfaces, the proposed technique has significant advantages. One advantage is related to the high stiffness of the tunneling probe as compared to the stiffness of the AFM cantilever. High stiffness and perpendicularity of the tip to the surface during surface processing eliminates bending beam effects on the typical AFM and ensures machining effectiveness. Purposely synthesized boron-doped single-crystal diamonds were used as a tip material. The results of experimental fabrication of nanostructures formed by nanoscratching with the use of the multifunctional scanning probe are demonstrated and discussed.

Keywords

scanning probe microscopy (SPM)nanostructurelithography (removal)
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1318: Symposium SS/TT/UU/VV – Advances in Spectroscopy and Imaging of Surfaces and Nanostructures , 2011 , mrsf10-1318-vv05-07
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

1. Eigler, D. M., Schweizer, E. K., Nature. 344, 524 (1990).Google Scholar
2. Nagahara, L. A., Thundat, T., and Lindsay, S. M., Appl. Phys. Lett. 57, 270 (1990).Google Scholar
3. Majumdar, A., Oden, P. I., Carrejo, J. P. et al. , Appl. Phys. Lett. 61, 2293 (1992).Google Scholar
4. Davidsson, P., Lindell, A., Makela, T. et al. , Microelectron. Eng. 45, 1 (1999).Google Scholar
5. Ishibashi, M., Heike, S., Kajiyama, H. et al. , Appl. Phys. Lett. 72, 1581 (1998).Google Scholar
6. Gimzewski, J. K., Möller, R., Phys. Rev. B. 36, 1284 (1987).Google Scholar
7. Kawasegi, N. et al. , Nanotechnology 16, 1411 (2005).Google Scholar
8. Park, J.W., Morita, N., and Lee, D.W., Journal of Nanoscience and Nanotechnology, 10, 4440 (2010)Google Scholar
9. Park, J.W., Lee, D.W., Takano, N. and Morita, N., Materials Science Forum, 79, 505 (2006).Google Scholar
10. McCord, M.A., Pease, R. F., Appl. Phys. Lett. 50, 569 (1987).Google Scholar
11. Van Loenen, E. J., Dijkkamp, D., Hoeven, A. J. et al. , J. Vac. Sci. Technol. A. 8, 574 (1989).Google Scholar
12. Versen, M., Klehn, B., Kunze, U. et al. , Ultramicroscope. 82, 159 (2000).Google Scholar
13. Miyake, S., Appl. Phys. Lett. 67, 2925 (1995).Google Scholar
14. Fang, T. H., Chang, W. J., J. Phys. Chem. Solids. 64, 913 (2003).Google Scholar
15. Oesterschulze, E., Malave, A., Keyser, U. F. et al. , Diam. Rel. Mater. 11, 667 (2002).Google Scholar
16. Ashida, K., Morita, N., Yushida, Y., JSME Int. J., Ser.C. 44, 244 (2001).Google Scholar
17. Kawasegi, N., Takano, N., Oka, D. et al. , J. Manuf. Sci.Eng. 128, 723 (2006).Google Scholar
18. Lysenko, O., Novikov, N., Gontar, A., et al. , J. Phys.: Conf. Ser. 61, 740 (2007).Google Scholar
19. Lysenko, O., Novikov, N., Grushko, V. et al. , Diam. Rel. Mater. 17, 1316 (2008).Google Scholar
20. Novikov, N., Nachalna, T., Ivakhnenko, S. et al. , Diam. Rel. Mater. 12, 1990 (2003).Google Scholar
21. Leung, T.P., Lee, W.B. and Lu, X.M., J. Mater. Proc. Tech., 73, 42 (1998).Google Scholar