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Gas Pressure Sensor Based on PECVD Grown Carbon Nanotubes

Published online by Cambridge University Press:  01 February 2011

Richard Ficek ,
Marek Elias ,
Lenka Zajickova ,
Ondrej Jasek  and
Radimir Vrba
Richard Ficek
Affiliation:
ficek@feec.vutbr.cz, Brno University of Technology, Faculty of Electrical Engineering and Communication, Department of Microelectronics, Udolni 53, Brno, 602 00, Czech Republic
Marek Elias
Affiliation:
mareke@physics.muni.cz, Masaryk University, Department of Physical Electronics, Kotlarska 2, Brno, N/A, Czech Republic, 00420 549493705, 00420 541211214
Lenka Zajickova
Affiliation:
lenkaz@physics.muni.cz, Masaryk University, Faculty of Science, Department of Physical Electronics, Kotlarska 2, Brno, 611 37, Czech Republic
Ondrej Jasek
Affiliation:
jasek@physics.muni.cz, Masaryk University, Faculty of Science, Department of Physical Electronics, Kotlarska 2, Brno, 611 37, Czech Republic
Radimir Vrba
Affiliation:
vrbar@feec.vutbr.cz, Brno University of Technology, Faculty of Electrical Engineering and Communication, Department of Microelectronics, Udolni 53, Brno, 602 00, Czech Republic
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Abstract

In present paper we describe development and manufacturing of the pressure sensor based on electron field emission from carbon nanotubes (CNTs). The sensor consisted of two parts, silicon membrane as an anode and multiwalled CNTs on a silicon cathode, creating a vacuum micro-chamber. Both electrodes were fabricated from the silicon single crystal (Si) wafer of the orientation (<100>) doped by phosphorus. The CNTs were grown by plasma enhanced CVD using iron catalyst in atmospheric pressure microwave torch. The catalyst was patterned into the area corresponding to the membrane dimensions. The thin CNTs with the diameter about 80 nm were straight standing perpendicularly to the substrate due to a crowding effect. In order to find the threshold current the emission characteristics of prepared sensors were measured.

Keywords

Csensorchemical vapor deposition (CVD) (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1018: Symposium EE – Applications of Nanotubes and Nanowires , 2007 , 1018-EE14-05
Copyright
Copyright © Materials Research Society 2007

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References

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