2 results
Ultra Shallow Junction Formation by RTA at High Temperature for Short Heating Cycle Time
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- Journal:
- MRS Online Proceedings Library Archive / Volume 532 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 3
- Print publication:
- 1998
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- Article
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Investigation of Lateral and Vertical Profiles Enhanced by Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 751
- Print publication:
- 1995
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- Article
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