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Smart-Cut® Technology: an Industrial Application of Ion Implantation Induced Cavities
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- Journal:
- MRS Online Proceedings Library Archive / Volume 510 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 381
- Print publication:
- January 1998
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Smart‐Cut® : The Basic Fabrication Process for Unibond® Soi Wafers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 446 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 177
- Print publication:
- 1996
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Subboundary Free Submicronic Devices on Laser-Recrystallized Silicon Oninsulator
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- Journal:
- MRS Online Proceedings Library Archive / Volume 35 / 1984
- Published online by Cambridge University Press:
- 25 February 2011, 607
- Print publication:
- 1984
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