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Understanding Multi Scale Pad Effects in Chemical Mechanical Planarization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1157 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1157-E02-01
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- 2009
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Measurement of Ultrathin Film Mechanical Properties by Integrated Nano-scratch/indentation Approach
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1049 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1049-AA04-04
- Print publication:
- 2007
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Single Asperity Wear and Stress-Assisted Dissolution of Copper
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1025 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1025-B16-04
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- 2007
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Surface Stress Generation During Formation of Alkanethiol Self-assembled Monolayer (SAM)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 951 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0951-E12-05
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- 2006
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Yield Improvement via minimization of step height non-uniformity in Chemical Mechanical Planarization (CMP)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W5.2
- Print publication:
- 2005
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Synergy between Chemical Dissolution and Mechanical Abrasion during Chemical Mechanical Polishing of Copper
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W5.8
- Print publication:
- 2005
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Multi-Scale Characterization of Pad Role on Material Removal Rate in CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 767 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, F2.5
- Print publication:
- 2003
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Morphometric and Ultrastructural Assessment of Bronchial Mucous Glands in Sheep Following Smoke Inhalation and Burn Injury
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- Journal:
- Microscopy and Microanalysis / Volume 8 / Issue S02 / August 2002
- Published online by Cambridge University Press:
- 01 August 2002, pp. 910-911
- Print publication:
- August 2002
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Mechanistic Understanding of Material Detachment During CMP Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 732 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, I4.3
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- 2002
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