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Fluorescence Correlation Spectroscopic Investigation of Surface Adsorption of CMP Slurry Additives on Abrasive Particles
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1560 / 2013
- Published online by Cambridge University Press:
- 30 September 2013, mrss13-1560-bb04-04
- Print publication:
- 2013
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- Article
- Export citation