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Comparison of Removal Efficiency of Cu Impurity on Si(100) Depending on the Cleaning Splits of (UV/O3 + HF) and (H2O2 + HF)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 477 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 253
- Print publication:
- 1997
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- Article
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