To support experimental investigations, a model based on ChemkinTM
software was used to simulate gas phase and surface chemistry during
plasma-enhanced catalytic CVD of carbon nanotubes. According to these
calculations, gas phase composition, etching process and growth rates are
calculated. The role of several carbon species, hydrocarbon molecules and
ions in the growth mechanism of carbon nanotubes is presented in this study.
Study of different conditions of gas phase activation sources and pressure
is performed.