2 results
HfO2-based Thin Films Deposited by RF Magnetron Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1160 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1160-H05-08
- Print publication:
- 2009
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- Article
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Investigation of the Si-rich silicon oxide by 3D atom probe tomography
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1111 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1111-D06-08-MM09-08
- Print publication:
- 2008
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- Article
- Export citation