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Higher-k Tetragonal Phase Stabilization in Atomic Layer Deposited Hf1-xZrxO2 (0<x<1) Thin Films on Al2O3 Passivated Epitaxial-Ge
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- Journal:
- MRS Advances / Volume 1 / Issue 4 / 2016
- Published online by Cambridge University Press:
- 26 January 2016, pp. 269-274
- Print publication:
- 2016
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- Article
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