3 results
Experimental study of the electrical properties of copper nitride thin films prepared by dc magnetron sputtering
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- Journal:
- The European Physical Journal - Applied Physics / Volume 53 / Issue 1 / January 2011
- Published online by Cambridge University Press:
- 23 December 2010, 10501
- Print publication:
- January 2011
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Structural and optical properties of copper nitride thin films in a reactive Ar/N2 magnetron sputtering system
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- Journal:
- The European Physical Journal - Applied Physics / Volume 50 / Issue 2 / May 2010
- Published online by Cambridge University Press:
- 31 March 2010, 20503
- Print publication:
- May 2010
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Structural and optical properties of silicon nitride film generated on Si substrate by low energy ion implantation
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- Journal:
- The European Physical Journal - Applied Physics / Volume 42 / Issue 2 / May 2008
- Published online by Cambridge University Press:
- 28 March 2008, pp. 103-107
- Print publication:
- May 2008
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