2 results
Effective Utilization of STEM Imaging Capability in FIB for Physical Failure Analysis on 20nm & 14nm Transistor Nodes in Semiconductor Wafer Foundries
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- Journal:
- Microscopy and Microanalysis / Volume 19 / Issue S2 / August 2013
- Published online by Cambridge University Press:
- 09 October 2013, pp. 902-903
- Print publication:
- August 2013
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- Article
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- You have access
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Automated TEM Sample Preparation from Smaller Device Structure Regions of Semiconductor ICs using Inline Dual-Beam CLM+ and TEMLink 150
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- Journal:
- Microscopy and Microanalysis / Volume 19 / Issue S2 / August 2013
- Published online by Cambridge University Press:
- 09 October 2013, pp. 900-901
- Print publication:
- August 2013
-
- Article
-
- You have access
- Export citation