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Effect of Electric ARC Plasma Jet Treatment on Mos Structure Reliability
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- Journal:
- MRS Online Proceedings Library Archive / Volume 391 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 139
- Print publication:
- 1995
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- Article
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Pre-Gate Oxidation Cleaning of Silicon Wafer by Electric Arc Plasma Jet Treatment
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- Journal:
- MRS Online Proceedings Library Archive / Volume 386 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 321
- Print publication:
- 1995
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- Article
- Export citation