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Preparation of Piezoelectric PZT Thin Films by Mocvd for MEMS Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 596 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 541
- Print publication:
- 1999
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- Article
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Low Temperature MOCVD of Thin Film PZT
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- Journal:
- MRS Online Proceedings Library Archive / Volume 541 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 375
- Print publication:
- 1998
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- Article
- Export citation