2 results
Silicide Technology in Deep Submicron Regime
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- Journal:
- MRS Online Proceedings Library Archive / Volume 514 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 171
- Print publication:
- 1998
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- Article
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Ultra-low Contact Resistivity by High Concentration Germanium and Boron Ion Implantation Combined with Low Temperature Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 427 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 153
- Print publication:
- 1996
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- Article
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