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Influence of Oxygen Addition and Substrate Temperature on Textured Growth of Al-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 721 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, J6.5
- Print publication:
- 2002
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- Article
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