2 results
Direct Measurements of Fracture Toughness and Crack Growth in Polysilicon MEMS
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- Journal:
- MRS Online Proceedings Library Archive / Volume 854 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, U10.6
- Print publication:
- 2004
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- Article
- Export citation
Mode–I Fracture Toughness of Tetrahedral Amorphous Diamond-like Carbon (ta-C) MEMS
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- Journal:
- MRS Online Proceedings Library Archive / Volume 854 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, U9.7
- Print publication:
- 2004
-
- Article
- Export citation