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Reduction of Internal Stress of a-Si:H Films by in Situ Measurements of Optical Emission Intensity from SiH4 Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 192 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 621
- Print publication:
- 1990
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- Article
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Study on Hydrophobic a-C:H:F Overcoat Layer for a-Si:H Photoreceptor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 118 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 429
- Print publication:
- 1988
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- Article
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