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A Study on Film Precursors in SiH4 Thermal CVD by use of Trench Coverage Measurements
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- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 121
- Print publication:
- 1989
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- Article
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Preparation of Superconducting Y‐Ba‐Cu‐O Thin Films by Mo‐Cvd
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- Journal:
- MRS Online Proceedings Library Archive / Volume 169 / 1989
- Published online by Cambridge University Press:
- 28 February 2011, 573
- Print publication:
- 1989
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- Article
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