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Fabrication of Bond and Etch Back Silicon on Insulator Using SiGe-MBE and Selective Etching Techniques
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- Journal:
- MRS Online Proceedings Library Archive / Volume 220 / 1991
- Published online by Cambridge University Press:
- 22 February 2011, 291
- Print publication:
- 1991
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- Article
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Characterization of Ion-Implanted SiO2 Properties Applicable to Laser Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1 / 1980
- Published online by Cambridge University Press:
- 15 February 2011, 391
- Print publication:
- 1980
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- Article
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