The total reflection x-ray fluorescence (TXRF) method of analyzing elemental contents Is based on the small angle irradiation of thin samples placed on a total reflecting backing with a narrow photon beam. Two instrumental problems are to be solved here. The first is to form the narrow beam with a small angular deviation. The usual way to solve this problem is to use collimators with small solid angles. These angles must be less than the critical angle for x-ray total reflection, which, in the energy range 10 - 20 keV has an order of magnitude around 10−3 rad.