1 results
Strategies for CMOS Low Equivalent Oxide Thickness Achievement with High-κ Oxides Grown on Si(001) by MBE
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1073 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1073-H03-08
- Print publication:
- 2008
-
- Article
- Export citation