4 results
Mechanical Properties of 0.1 Micron Thick Simox Film Measured Using on-Chip Tensile Test System
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- Journal:
- MRS Online Proceedings Library Archive / Volume 687 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, B8.3
- Print publication:
- 2001
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Tensile Test of Bulk- and Surface-Micromachined 0.1-νm Thick Silicon Film using Electrostatic Force Grip System
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- Journal:
- MRS Online Proceedings Library Archive / Volume 687 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, B5.45
- Print publication:
- 2001
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Unstable Etching Of Si(110)with Potassium Hydroxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 657 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, EE5.27
- Print publication:
- 2000
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Roughness Characterization of Si(110) Etched in TMAH by Atomic Force Microscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 605 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 305
- Print publication:
- 1999
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