7 results
Quantification of Composition of Epitaxial Si/SiGe by EELS
-
- Journal:
- Microscopy and Microanalysis / Volume 24 / Issue S1 / August 2018
- Published online by Cambridge University Press:
- 01 August 2018, pp. 472-473
- Print publication:
- August 2018
-
- Article
-
- You have access
- Export citation
Detailed Microstructure Characterizations of BEOL Cu Interconnects
-
- Journal:
- Microscopy and Microanalysis / Volume 24 / Issue S1 / August 2018
- Published online by Cambridge University Press:
- 01 August 2018, pp. 2188-2189
- Print publication:
- August 2018
-
- Article
-
- You have access
- Export citation
Validation of Minimum Electron Beam Dosage on Characterization of Carbon-Depletion in ULK Dielectric Materials by EELS Quantifications
-
- Journal:
- Microscopy and Microanalysis / Volume 24 / Issue S1 / August 2018
- Published online by Cambridge University Press:
- 01 August 2018, pp. 1998-1999
- Print publication:
- August 2018
-
- Article
-
- You have access
- Export citation
Application of STEM EELS Quantification Relative Compositional Ratio Mapping to Characterize SiCOH - Ultra Low-k Dielectric Materials in Si-based Devices
-
- Journal:
- Microscopy and Microanalysis / Volume 22 / Issue S3 / July 2016
- Published online by Cambridge University Press:
- 25 July 2016, pp. 1532-1533
- Print publication:
- July 2016
-
- Article
-
- You have access
- Export citation
Minimize Electron Beam Damage during Characterization of Carbon-Depletion in Ultra Low-K Dielectric Materials by STEM EELS Elemental Mapping
-
- Journal:
- Microscopy and Microanalysis / Volume 22 / Issue S3 / July 2016
- Published online by Cambridge University Press:
- 25 July 2016, pp. 334-335
- Print publication:
- July 2016
-
- Article
-
- You have access
- Export citation
Application of EFTEM and XEDS Elemental Mapping to Characterization of Nanometer Devices in Semiconductor Wafer-Foundries
-
- Journal:
- Microscopy and Microanalysis / Volume 21 / Issue S3 / August 2015
- Published online by Cambridge University Press:
- 23 September 2015, pp. 279-280
- Print publication:
- August 2015
-
- Article
-
- You have access
- Export citation
Characterization of Ultra Low-K Dielectric Materials by STEM EELS Elemental Mapping
-
- Journal:
- Microscopy and Microanalysis / Volume 21 / Issue S3 / August 2015
- Published online by Cambridge University Press:
- 23 September 2015, pp. 2075-2076
- Print publication:
- August 2015
-
- Article
-
- You have access
- Export citation