2 results
In Situ Design of Experiments for A Reactive Ion Etching Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 569 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 165
- Print publication:
- 1999
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- Article
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An Extended Kalman Filter Based Method for Fast In-Situ Etch Rate Measurements
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- Journal:
- MRS Online Proceedings Library Archive / Volume 406 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 87
- Print publication:
- 1995
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- Article
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