1 results
Chemical Vapor Deposited Tungsten Film on Molecular Layer Epitaxially-Grown GaAs and its Application to Low Resistivity Contact
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 573 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 175
- Print publication:
- 1999
-
- Article
- Export citation