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Titanium Hafnium Oxide Alloy Films by a Novel Sub-Atomic Layer Sputtering Process for High Index and Graded Index Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1565 / 2013
- Published online by Cambridge University Press:
- 07 October 2013, mrss13-1565-hh05-08
- Print publication:
- 2013
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- Article
- Export citation