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Rapid Isothermal Annealing of N-Implanted 6H-SiC Layers Used for Fabrication of p-n Photodiodes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 97 / 1987
- Published online by Cambridge University Press:
- 25 February 2011, 195
- Print publication:
- 1987
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- Article
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