3 results
Advanced Ion Source Technology for High Resolution and Stable FIB Nanofabrication employing Gallium and new Ion Species
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- Journal:
- Microscopy and Microanalysis / Volume 20 / Issue S3 / August 2014
- Published online by Cambridge University Press:
- 27 August 2014, pp. 312-313
- Print publication:
- August 2014
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Wafer-Scale Ion Beam Lithography of Nanopore Devices
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- Journal:
- Microscopy and Microanalysis / Volume 19 / Issue S2 / August 2013
- Published online by Cambridge University Press:
- 09 October 2013, pp. 912-913
- Print publication:
- August 2013
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Focused Ion Beam Lithography of Nanophotonic Structures
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- Journal:
- Microscopy and Microanalysis / Volume 18 / Issue S2 / July 2012
- Published online by Cambridge University Press:
- 23 November 2012, pp. 612-613
- Print publication:
- July 2012
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