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Electrical Properties of n- and p-type In0.53Ga0.47As Layers Formed by Ion Implantation and Rapid Thermal(Flash)Anneal
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- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 375
- Print publication:
- 1987
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- Article
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