2 results
Process Optimization of UV Curing for Ultra Low-k Dielectrics and High-Stress SiN Liners
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B03-22
- Print publication:
- 2007
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- Article
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Film Characterization of Ultra Low-k Dielectrics Modified by UV Curing with Different Wavelength Bands
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F01-06
- Print publication:
- 2006
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- Article
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