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Diminution of the activity of B atoms by H-induced defects in H2 and B2H6 co-implanted Si
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- Journal:
- The European Physical Journal - Applied Physics / Volume 27 / Issue 1-3 / July 2004
- Published online by Cambridge University Press:
- 15 July 2004, pp. 129-132
- Print publication:
- July 2004
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- Article
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