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Processing and Characterization of Silica Xerogel Films for Low-K Dielectric Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 29
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- 1999
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Fabrication and Characterization of Spin-On Silica Xerogel Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 99
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- 1998
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Ion Beam Techniques for Low K Materials Characterization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 125
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- 1998
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