2 results
Electrical Behavior of Nano-Scaled Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 812 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, F8.4
- Print publication:
- 2004
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- Article
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Impact of Annealing on the Resistivity of Ultrafine Cu Damascene Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E4.2
- Print publication:
- 2003
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- Article
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