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High Speed Surface Modification in Fine-Pitch Package Substrate Manufacturing Process with High Density 60 Hz Nonequilibrium Atmospheric Pressure Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1401 / 2012
- Published online by Cambridge University Press:
- 16 July 2012, mrsf11-1401-t05-03
- Print publication:
- 2012
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- Article
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