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The paper presents the research results of influence of various parameters of magnetic field concentrator geometry on sensitivity of magnetically controlled MEMS switches. It is shown that magnetic sensitivity increases with the growth of the magnetic concentrator width and practically does not depend on its length. It is established that dependence of magnetic sensitivity on the overlap length of the ferromagnetic flexible contact-concentrator has a minimum corresponding to 2-3 lengths of the contact gap. Recommendations on sensitivity increase of magnetically controlled MEMS switches are provided.
The paper presents the research results of formation peculiarities of barrier electrically insulated coatings based on titanium oxide (TiO2) under conditions of AC-DC electrochemical anodizing. It is shown that overlapping of AC component (at the frequency of 100 kHz – 10 MHz) leads to formation of coatings 1.2-1.4 times thicker. Dependences of the coating thickness on frequency under various ratios of the AC-component amplitude to the DC-component of anodizing voltage have been obtained.
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